Research Laboratories

Thin Film Processing

• AJA International ATC-1500 Sputtering chamber
• Base pressure <10-7 Torr
• 4 2″ magnetron sputtering sources
• In-situ annealing and RF bias
• Load lock for rapid sample exchange
• k-Space, Inc. Multi-Optic System (MOS) for in-site stress measurement
• k-Space, Inc. BandiT for wafer and film temperature measurement
• Quartz Crystal Thickness Monitor

• AJA International Orion Sputtering Chamber
• Base pressure <10-7 Torr
• 3 2″ magnetron sputtering sources
• In-situ annealing 
• Load lock for rapid sample exchange
• Quartz Crystal Thickness Monitor

• Adixen ASM 340 Helium Leak Detector

Annealing Laboratory

• Laboratory furnace (Tmax 1000 deg C) 
• MTI Tube Furnace (Tmax 1100 deg C)
• Lindberg Blue Mini Furnace (Tmax 1100 deg C)
• Lindberg Blue Tube Furnace (Tmax 1200 deg C)
• SentroTech tube furnace (Tmax 1700 deg C)

Inert Atmosphere Capabilities 

• MBraun UNIlab Pro Glovebox Workstation
• Quartz tubing vacuum encapsulation 

Hot Isostatic Press

• American Isostatic Press 30H
• Temperature max 2000 deg C
• Pressure max 30 KSI

Specimen Preparatory Laboratory

• TEM preparation equipment:
  • Gatan 601 disk grinder
  • Gatan Precison Ion Polishing Mill
  • Fischione Ultrasonic drill
  • Fischione dimpler
• Ultrasonic bath
• MTI Diamond Wire Saw
• Buehler Autopolisher
• Buehler Mounting Press
• Buehler VibroMet 
• Buehler IsoMet 4000 Precision saw
• Struers Minitom
• Disco D6 dicing saw
• Electro-polishing unit for atom probe preparation
• Nikon Optiphot M

Electromagnetic Mechanical Apparatus (EMMA)

• System for mechanically testing materials at ultra high temperatures
• Using the concept of the Lorentz Force, specimens can be subjected to a mechanical load using the concentrated magnetic field generated by an electromagnet and the current flowing through the specimen and heating it up resistively via a clamp, motor driven, pressure sensitive stage.
• Laser profile displacement
• Pyrometer up to 3000 deg C
• Environmental control/vacuum system
• Labview automation

UA’s Central Analytical Facility (CAF)

• Professor Thompson’s research group members are active users of UA’s Central Analytical Facility. Professor Thompson was the Principle Investigator for a team of faculty members for the FEI Tecnai F20 Supertwin TEM (NSF-DMR-0421376) and laser attachment to the Imago Scientific Instruments Local Electrode Atom Probe, LEAP (NSF-DMR-0722631) housed in the CAF.
  
  Professor Thompson is a member of the CAF external faculty board and has been part of faulty teams leading institutional infrastructure investments, such as the base-LEAP instrument and the FEI Quanta 3D dual electron and focus ion beam (FIB) instrument, at UA.
• CAF Lab Video